TEC01 Conjunctional Freezing-Assisted Ultrasonic Extraction of Silicon Nitride Nanopowders from Thin Films Prepared by Physical Vapor Deposition Technique

Abstract

In this work, the effects of different extraction parameters on the particle size of the nanopowders extracted from silicon nitride thin film samples were studied. These nanopowders were obtained by the conjunctional freezing-assisted ultrasonic extraction method. Results showed that extraction parameters such as freezing temperature, ultrasonic frequency and application time are very effective in determining the nanoparticle size, which is very important for many applications and uses of highly-pure nanomaterials and nanostructures.